Introductory MEMS: Fabrication and Applications

Out of stock. Usually delivers within 4 weeks.

Description

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter.

Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.

Product Details

Price
£69.98
Publisher
Springer-Verlag New York Inc.
Publish Date
7 September 2014
Language
English
Type
Paperback
EAN/UPC
9781489984210
BIC Categories:

Earn By Promoting Books

Earn money by sharing your favourite books through our Affiliate programme.

Become an Affiliate
We use cookies and similar methods to recognize visitors and remember their preferences. We also use them to help detect unauthorized access or activity that violate our terms of service, as well as to analyze site traffic and performance for our own site improvement efforts. To learn more about these methods, including how to disable them view our Cookie Policy.